Atomic Force Microscopy (AFM) Veeco Dimension 3100

The Veeco Dimension 3100 atomic force microscope (AFM) in the Swagelok Center for Surface Analysis of Materials provides users the ability to characterize the surface roughness of materials and nanofabricated structures.


  • Contact mode, tapping mode, and phase imaging.
  • Electrostatic force microscopy.
  • Magnetic force microscopy.
  • Nanomanipulation and nanolithography.


Supported Sample Sizes

  • Maximum wafer diameter: 200 mm (8 in).
  • Maximum substrate thickness: 12 mm.
  • Small pieces supported: Yes.


Typical Applications

  • Characterization of surface roughness.
  • Pattern characterization for lithography structures, magnetic media, CD/DVDs.
  • Structure characterization of polymers, biomaterials and other samples.
  • Nanomanipulation and nanolithography by using AFM tip.