Lévy process-based stochastic modeling for machine performance degradation prognosis Read more about Lévy process-based stochastic modeling for machine performance degradation prognosis
Hybrid machine learning for human action recognition and prediction in assembly Read more about Hybrid machine learning for human action recognition and prediction in assembly
Deep Learning-driven data curation and model interpretation for smart manufacturing Read more about Deep Learning-driven data curation and model interpretation for smart manufacturing
Integrated process-system modeling and control through graph neural network and reinforcement learning Read more about Integrated process-system modeling and control through graph neural network and reinforcement learning
Progress in Materials Development for 157nm Photolithography: Photoresists and Pellicles Read more about Progress in Materials Development for 157nm Photolithography: Photoresists and Pellicles
Optimizing polymers to increase pellicle lifetime and transmission for 157-nm lithography Read more about Optimizing polymers to increase pellicle lifetime and transmission for 157-nm lithography
A Novel Process Methodology for Cutting Uniform Nanostructures Read more about A Novel Process Methodology for Cutting Uniform Nanostructures
Optical properties and electronic structure of oxidized and reduced single-crystal strontium titanate Read more about Optical properties and electronic structure of oxidized and reduced single-crystal strontium titanate
Novel Process Methodology for Uniformly Cutting Nanotubes Read more about Novel Process Methodology for Uniformly Cutting Nanotubes
Immersion fluids for lithography: refractive index measurement using prism minimum deviation techniques Read more about Immersion fluids for lithography: refractive index measurement using prism minimum deviation techniques