Digital twin-driven virtual commissioning of machine tool Read more about Digital twin-driven virtual commissioning of machine tool
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Consequence of {Nanometer-Scale} Property Variations to Macroscopic Properties of {CrOCN} Thin Films Read more about Consequence of {Nanometer-Scale} Property Variations to Macroscopic Properties of {CrOCN} Thin Films
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157-nm imaging using thick single-layer resists Read more about 157-nm imaging using thick single-layer resists
Valence electron energy loss study of Fe-doped {SrTiO3} and a Σ13 boundary: electronic structure and dispersion forces Read more about Valence electron energy loss study of Fe-doped {SrTiO3} and a Σ13 boundary: electronic structure and dispersion forces
157-nm pellicles: polymer design for transparency and lifetime Read more about 157-nm pellicles: polymer design for transparency and lifetime
Behavior of candidate organic pellicle materials under 157-nm laser irradiation Read more about Behavior of candidate organic pellicle materials under 157-nm laser irradiation
