EECS500 Fall 2013 Department Seminar

Mina Rais-Zadeh
Gallium Nitride Microelectromechanical Systems (GaN MEMS)
University of Michigan
White Bldg., Room 411
11:30am - 12:30pm
October 24, 2013

Invention of transistors and development of microelectronics unleashed a revolution in computing and communication. This revolution was mostly brought about by the fact that silicon-based transistors and ICs could be miniaturized at an unprecedented level. Following the same trend, micro-electromechanical systems (MEMS), have been extensively employed for sensing and in mobile applications.  In the next few decades, the MEMS field is expected to grow even more rapidly and find wider applications. On the other hand, in the last few years we have seen rapid growth of III-V semiconductors geared towards a variety of applications where silicon performance falls short. GaN, a III-V semiconductor, is proven to be the material of choice for high-frequency, high-power, and high-temperature applications owing to its wide band-gap and large breakdown electric field. GaN also offers a number of excellent mechanical properties such as strong piezoelectric and pyroelectric effects, large acoustic velocity, and high mechanical and chemical stability, making it a suitable material for NEMS/MEMS.  In this talk, I will go over the design of micro-resonators and resonant sensors using GaN, and discuss the application of these devices in timing and integrated sensing. I will explain the need for high quality factor and discuss the physical phenomena that limit the performance and scaling of GaN MEMS and discuss possible solutions to improve those.


Mina Rais-Zadeh received the B.S. degree in electrical engineering from Sharif University of Technology and M.S. and Ph.D. degrees both in Electrical and Computer Engineering from Georgia Institute of Technology in 2005 and 2008, respectively. From August 2008 to 2009, she was a Postdoctoral Research Fellow with the Integrated MEMS Group, Georgia Institute of Technology. Since January 2009, she has been with the University of Michigan, Ann Arbor, where she is currently an Assistant Professor in the Department of Electrical Engineering and Computer Science. Dr. Rais-Zadeh is the recipient of the NSF CAREER Award (2011), IEEE Electron Device Society Early Career Award (2011), NASA Early Career Faculty Award (2012), and the Crosby Research Award from the University of Michigan (2013). She is one of 81 invitees by the National Academy of Engineering to attend the 19th annual Frontiers of Engineering Symposium (2013). She received the best poster award at the Transducers conference (2013) and was the finalist in student paper competitions at the SiRF (2007) and IMS (2011) conferences. She is the chairperson of the Display, Sensors and MEMS (DSM) sub-committee at the 2013 IEEE International Electron Devices Meeting (IEDM) and a senior member of IEEE. She has served as a member of the technical program committee of IEEE IEDM (2011-2013), IEEE Sensors Conference (2011-2013), the Hilton Head workshop (2012), and IEEE MEMS Conference (2014). Her research interests include RF MEMS, passive micromachined devices for communication applications, resonant micromechanical devices, gallium nitride MEMS, and micro/nano fabrication process development.