EECS500 Spring 2013 Department Seminar

Xiuling Li
Semiconductor Nanoelectronic and Nanophotonic Devices: performance and scalability
University of Illinois at Urbana-Champaign
White Bldg., Room 411
11:30am - 12:30pm
March 28, 2013

This talk will focus on two types of scalable semiconductor nanotechnology platforms, namely nanowires and self-rolled-up tubes, and their applications in nanoelectronics, photonics, and energy harvesting.

Interests in semiconductor nanowires have increased exponentially over the past decade because of their unique optical and electrical properties. I will present our discovery of a nanowire paradigm that is planar, self-aligned, twin-defect free, high carrier mobility, transfer-printable, and compatible with existing microelectronics processes. The planar nanowire growth and doping mechanism by MOCVD, as well as the device characteristics of MESFET, MOSFET, and HEMT using such GaAs nanowire as the channel material, will be analyzed. In addition, vertical III-V nanowires heterogeneously integrated with silicon and graphene, as well as high aspect ratio nanowire arrays fabricated by Metal assisted chemical etching (MacEtch) for photovoltaics will be presented. Self-rolled-up tube, on the other hand, is a relatively new platform that processes like 2D planar structures and functions like 3D architectures with an additional degree of freedom. The formation process, and applications of these tubes for passive electronic devices with dramatically reduced footprint and enhanced performance, as well as potential photonic applications, will be discussed.


Xiuling Li received her Ph.D. degree from the University of California at Los Angeles. She joined the faculty of the University of Illinois in 2007, after working at a startup company for six years. She is currently an associate professor in the Department of Electrical and Computer Engineering. Her research interests are in the area of nanostructured semiconductor materials and devices. She has won the NSF CAREER award (2008), DARPA Young Faculty Award (2009), ONR Young Investigator Award (2011), and the Dean’s Award for Excellence in Research (2012). She has published over 75 journal papers and holds several patents. Her group’s work on the planar nanowires has won one of the best student paper awards at the 2008 IEEE Photonic Society annual meeting. The micro and nanotube work has been identified as an outstanding symposium paper presented at the 2008 MRS meeting.