Thursday, January 1, 2004 - 12:00 PM Roderick Kunz Michael Switkes Roger Sinta Jane Curtin Roger H. French Robert Wheland Chien-Ping Kao Michael Mawn Lois Lin Paula Wetmore Val Krukonis Kara Williams 2004 Journal of Microlithography, Microfabrication, and Microsystems 3 73 Subsite Vacuum Ultraviolet
