Surface Analysis

SCSAM has three surface analysis instruments for Auger spectroscopy, X-ray photoelectron spectroscopy (also known as electron spectroscopy for chemical analysis), and time-of-flight secondary ion mass spectroscopy.

PHI 680 Scanning Auger Microprobe

PHI Versaprobe 5000 X-ray Photoelectron Spectroscopy/ESCA

PHI TRIFT V nanoTOF Time of Flight Secondary Ion Mass Spectrometer (TOF-SIMS)