SCSAM has three surface analysis instruments for Auger spectroscopy, X-ray photoelectron spectroscopy (also known as electron spectroscopy for chemical analysis), and time-of-flight secondary ion mass spectroscopy.
PHI 680 Scanning Auger Microprobe
PHI Versaprobe 5000 X-ray Photoelectron Spectroscopy/ESCA
PHI TRIFT V nanoTOF Time of Flight Secondary Ion Mass Spectrometer (TOF-SIMS)
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