Zamani, H., Lee, J., Rajgopal, S., & Zorman, C.(2017).3C-SiC microdisk mechanical resonators with multimode resonances at radio frequencies.Journal of Micromechanics and Microengineering.
Ho, S., Rajgopal, S., & Mehregany, M.(2016).Thick PECVD silicon dioxide films for MEMS devices.Sensors and Actuators, A: Physical [09244247],240, 9-Jan.
