Friday, June 23, 2000 - 12:00 PM Roger H. French Michael Crawford Andrew Feiring Jerald Feldman Mookkan Periyasamy Frank Schadt Robert Smalley Fredrick Zumsteg Roderick Kunz Veena Rao Ling Lao Susan Holl 2000 Proceedings of SPIE 3999 Subsite Vacuum Ultraviolet