Ma, L., Pan, D., Xie, Y., Wang, F., Yuan, C., Ma, L., Pan, D., Xie, Y., Wang, F., & Yuan, C.(2017).Experimental Study of Process Emissions From Atomic Layer Deposition of Al2O3 Under Various Temperatures and Purge Time.Journal of Manufacturing Science and Engineering,139(5),051013.
Ma, L., Pan, D., Xie, Y., Wang, F., Yuan, C., Ma, L., Pan, D., Xie, Y., Wang, F., & Yuan, C.(2017).Experimental Study of Process Emissions From Atomic Layer Deposition of Al2O3 Under Various Temperatures and Purge Time.Journal of Manufacturing Science and Engineering,139(5),051013.
Xie, Y., Pan, D., Ma, L., & Yuan, C.(2016).Optimizing the process efficiency of atomic layer deposition of alumina for its sustainability improvement: a combined experimental and modeling study.Journal of Cleaner Production ,133(1),338–347.
Pan, D., Ma, L., Xie, Y., Jen, T., & Yuan, C.(2016).Effects of gap size, temperature and pumping pressure on the fluid dynamics and chemical kinetics of in-line spatial atomic layer deposition of Al2O3.International Journal of Heat and Mass Transfer ,96, 189-198.
Pan, D., Guan, D., Jen, T., & Yuan, C.().Atomic Layer Deposition Process Modeling and Experimental Investigation for Sustainable Manufacturing of Nano Thin Films.Journal of Manufacturing Science and Engineering-ASME Transaction ,138(10),101010.
