John Burnett

Publications

Yang, S., Kaplan, S., French, R. H., & Burnett, J. H. (2009). Index of refraction of high-index lithographic immersion fluids and its variability. Journal of {Micro/Nanolithography}, {MEMS} and {MOEMS}, 8 , 023005.
Synowicki, R., Pribil, G., Cooney, G., Herzinger, C., Green, S., French, R. H., Yang, S. H., Burnett, J. H., & Kaplan, S. H. (2004). Fluid refractive index measurements using rough surface and prism minimum deviation techniques. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 22 , 3450.
French, R. H., Yang, S. H., Lemon, M. H., Synowicki, R. H., Pribil, G. H., Cooney, G. H., Herzinger, C. H., Green, S. H., Burnett, J. H., & Kaplan, S. H. (2004). Immersion fluid refractive indices using prism minimum deviation techniques. Proceedings of SPIE.