Chen, H., Jia, H., Zorman, C., & Feng, P.(2020).Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances.Journal of Microelectromechanical Systems,29(5),783-789.
Chen, H., Jia, H., Zorman, C., & Feng, P.(2020).Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances.Journal of Microelectromechanical Systems,29(5),783-789.
Chen, H., Jia, H., Liao, W., Pashaei, V., Arutt, C., McCurdy, M., Zorman, C., Reed, R., Schrimpf, R., & Alles, M.(2019).Probing heavy ion radiation effects in silicon carbide (SiC) via 3D integrated multimode vibrating diaphragms.APPLIED PHYSICS LETTERS,114(10).
